Secondary Ion Emission and Sputter Yields from Metal Targets under F₂⁺Bombardment

Margaret A. Frisch, Wilhad Reuter

Analytical Chemistry

B.D. Silverman, J.W. Bartha, et al.

Journal of Polymer Science Part A: Polymer Chemistry

J. Warnock, J. Keaty, et al.

IBM J. Res. Dev

J.G. Clabes

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films