Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
04 Feb 2004

Secondary defect formation in bonded silicon-on-insulator after boron implantation

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Abstract

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Date

04 Feb 2004

Publication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Authors

  • A.F. Saavedra
  • A.C. King
  • K.S. Jones
  • E.C. Jones
  • K.K. Chan
IBM-affiliated at time of publication

Topics

  • Physical Sciences

Resources

  • Publication

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