William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A complete data acquisition and image processing computer workstation has been developed to complement the STM. The computer is used to control the raster scans, to acquire multi-channel analog data, and to store the data for later analysis at the workstation. Both 2D gray scale and 3D line scan images can be processed, and displayed with 1K × 1K pixel resolution in real time. Topography and real space spectroscopy images are acquired on up to 48 channels using signal conditioners and a multiplexed A/D converter. Computer image processing such as contrast enhancement, convolution filtering, and real-time background subtraction is provided. This computer workstation is proposed as a cost effective universal controller/recorded for STM. © 1987.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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SPIE Advanced Lithography 2007