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Microelectronic Engineering
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Scanning thermal profiler

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Abstract

A new high resolution profilometer has been demonstrated based upon a non-contacting near field thermal probe. The scanned thermal probe provides a direct measurement of surface profile without dependence upon material properties. Non-contact profiling of resist and metal films have shown a lateral resolution of approximately 100 nanometers and a depth resolution below 10 nanometers. The basic theory of the new probe will be described and the results presented. © 1986.

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Microelectronic Engineering

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