U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
A new high resolution profilometer has been demonstrated based upon a non-contacting near field thermal probe. The scanned thermal probe provides a direct measurement of surface profile without dependence upon material properties. Non-contact profiling of resist and metal films have shown a lateral resolution of approximately 100 nanometers and a depth resolution below 10 nanometers. The basic theory of the new probe will be described and the results presented. © 1986.
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters