T. Schneider, E. Stoll
Physical Review B
A new high resolution profilometer has been demonstrated based upon a non-contacting near field thermal probe. The scanned thermal probe provides a direct measurement of surface profile without dependence upon material properties. Non-contact profiling of resist and metal films have shown a lateral resolution of approximately 100 nanometers and a depth resolution below 10 nanometers. The basic theory of the new probe will be described and the results presented. © 1986.
T. Schneider, E. Stoll
Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Eloisa Bentivegna
Big Data 2022