Scanning reflection image from a solid specimen in the scanning electron microscope with a condenser‐objective lens

Abstract

To achieve the highest resolution in the scanning electron microscope (SEM) or in the scanning transmission electron microscope (STEM), the sample must be mounted in the high‐field region of a condenser‐objective lens. A secondary electron (SE) image can then be obtained using a collector before the lens. It is also possible to obtain a scanning reflection image by tilting the specimen so that the second half of the condenser‐objective lens field deflects the forward‐scattered electrons onto the transmission detector beyond the specimen. Experiments were made with an unmodified commercial SEM fitted with a condenser‐objective in the upper stage and with a transmission detector, and it was found that the scanning reflection image from a solid sample can provide additional useful information when used in conjunction with the SE image. Copyright © 1988 Foundation for Advances in Medicine and Science, Inc.