Room-temperature oxidation of Ni, Pd, and Pt silicides

The room-temperature oxidation of Ni, Pd, and Pt silicides has been studied using electron spectroscopy for chemical analysis. It has been found that (1) Si atoms oxidize predominantly, (2) the oxidation of Si is enhanced in the metal-rich silicides, and (3) the growth of the surface oxide layer leaves behind a phase enriched with metal.