Publication
Journal of Applied Physics
Paper

Room-temperature oxidation of Ni, Pd, and Pt silicides

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Abstract

The room-temperature oxidation of Ni, Pd, and Pt silicides has been studied using electron spectroscopy for chemical analysis. It has been found that (1) Si atoms oxidize predominantly, (2) the oxidation of Si is enhanced in the metal-rich silicides, and (3) the growth of the surface oxide layer leaves behind a phase enriched with metal.

Date

01 Dec 1985

Publication

Journal of Applied Physics

Authors

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