Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We obtain the a-b plane infrared conductivity of YBa2Cu3O7 from temperature-dependent reflectivity spectra of crystals and films with Tc92 K. The normal state is characterized by a free-carrier band with an enhanced low-frequency mass and a frequency-dependent scattering rate, which indicate coupling to an excitation spectrum with a characteristic frequency scale of c700 cm-1 and coupling strength of 2 to 3. © 1989 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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ADMETA 2011
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Technical Digest-International Electron Devices Meeting
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Physical Review B