E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
P. Alnot, D.J. Auerbach, et al.
Surface Science
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007