Peter J. Price
Surface Science
The photochemistry of poly(cyclohexylmethylsilane) (PCHMS) has been studied, and PCHMS homopolymer has been shown to be useful for high resolution, deep UV pattern generation either by using a commercial 1:1 projection printer operating in the deep UV or by an excimer laser stepper at 248 nm. In the case of the excimer laser stepper, images 0.5 μm and smaller have been printed, which represents an improvement over the 0.8 μm limit previously reported for polysilane copolymers. Copyright © 1989 Society of Plastics Engineers
Peter J. Price
Surface Science
Imran Nasim, Melanie Weber
SCML 2024
Ronald Troutman
Synthetic Metals
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009