About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
Chemistry of Materials
Paper
Poly(1,4-phenyleneazine N,N-dioxide): A Recyclable Material for a Solventless Laser-Imageable Resist Process
Abstract
Upon heating under vacuum, poly(1,4-phenyleneazine-N,N-dioxide) depolymerizes to give 1,4-dinitrosobenzene which can be condensed onto a suitable substrate. The nature of the condensate is dependent on the substrate temperature. At temperatures below −110 °C the condensate can be monomeric, at about −50 °C it is a mixture of dimer and oligomers, and at −20 °C it is polymeric. Thick and thin films of the polymer can be rapidly prepared by volatilization of 1,4-dinitrosobenzene from the bulk polymer onto a substrate and allowing the collected condensate to warm to room temperature. The resultant films appear to be stable indefinitely at room temperature and atmospheric pressure yet can be selectively removed from the substrate using a focused visible laser beam. After a suitable image-transfer process, the polymer is removed by heating to 100 °C. The laser imaging, deposition, and final removal of polymer are all nondestructive, thermal processes. Thus if a suitable vacuum chamber equipped with a cooling trap is used for this process, the polymer is 100% recyclable. © 1994, American Chemical Society. All rights reserved.