William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
P. Alnot, D.J. Auerbach, et al.
Surface Science