Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
The effect of ZrO2 addition on the phase transformation of Bi2O3 was studied with powder X‐ray diffraction and differential thermal analysis. Samples containing higher than a few mole percent ZrO2 were obtained as the metastable β phase (tetragonal) at room temperature when they were cooled at 20°C/min from 800°C where the δ phase (fcc) is stable. When the same samples were cooled at the same rate from 1000°C, which is above the solidus, they formed the stable α phase (monoclinic) at room temperature. Evidence for the relatively higher solubility of ZrO2 in the α phase is discussed to explain this observation. Copyright © 1990, Wiley Blackwell. All rights reserved
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
J. Tersoff
Applied Surface Science