A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
We report the formation and directed self-assembly of sub-10 nm half-pitch line patterns from lamellar microdomains of a block copolymer hybrid. The hybrid, which is a mixture of poly(styrene-b-ethylene oxide) (PS-b-PEO) and a low molecular weight organosilicate (OS), shows strong segregation between two phases (i.e. PS and PEO+OS) and forms lamellar microdomains of down to approximately 7 nm in half-pitch. Patterns applicable to multifinger device layouts are created by self-assembling the hybrid on topographic pre-patterns with a chemically non-selective surface. With careful design of the guiding topographic pattern geometry, well-controlled lateral placement including bent structures of lamellar microdomains can be obtained by this approach. © IOP Publishing Ltd.
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
K.N. Tu
Materials Science and Engineering: A
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology