Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Given ζ ∈ (-1, 0), n ∈ N, we discuss the optimal recovery of f{hook} (ζ), for f{hook} analytic and bounded in . |Z|&<1 < 1, from the knowledge of the values of f{hook} at n points z1,.zm∈[0,l), where these points are chosen to produce the least possible intrinsic error. The optimal algorithms are explicitly determined. © 1983 Academic Press Inc. (London) Limited.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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IEEE International Symposium on Information Theory - Proceedings
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ISIT 2003
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