Application of atomic-force microscopy to phase-shift masks
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
A new form of read out for high density read-only memory is presented whereby a data density of 400 bits/μm2, corresponding to 256 Gbits/in.2, can be accessed at data rates in the tens of MHz range. The technique is based on detecting the modulation in light scattering from a sharp scattering object due to the dipole-dipole coupling between the probe and surface being scanned using a sensitive homodyne interferometer. Theoretical considerations indicate that data densities in the 100 Tbits/in.2 range could be accessed at data rates of 100 MHz using this technology. © 1997 American Institute of Physics.
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
E. Kratschmer, H.S. Kim, et al.
IVMC 1995
E. Babich, S. Rishton, et al.
American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
C.C. Williams, H.K. Wickramasinghe
Applied Physics Letters