E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
A review is presented of the optical measurement techniques as they have been applied to the characterization of III–V compounds and alloys. The methods discussed and the more detailed examples cited are: absorption (AIP, Ga1−xAlxP), reflectance, cathodoluminescence (Ga1−xAlxAs), photoluminescence (GaAs1−yPy), electroluminescence (time-decay of Ga1−xAlxAs EL), and automated photoluminescence materials screening (GaAs1−yPy). © 1974, North-Holland Publishing Company. All Rights Reserved. All rights reserved.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters