On the Removal of Insulator Process Induced Radiation Damage from Insulated Gate Field Effect Transistors at Elevated Pressure

Ming L. Yu

Physical Review B

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008

Ronald Troutman

Synthetic Metals

P. Alnot, D.J. Auerbach, et al.

Surface Science