Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper presents an approach to the design of linear, lumped, time-invariant, multivariable feedback systems, subject to various frequency and time-domain performance specifications. The approach is based on the use of stabilizing controller parametrizations which result in the formulation of feedback system design problems as convex, nondifferentiable optimization problems. These problems are solvable by recently developed nondifferentiable optimization algorithms for the constrained minimization of regular, uniformly locally Lipschitz continuous functions in RN. © 1989 IEEE
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Pradip Bose
VTS 1998
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Chi-Leung Wong, Zehra Sura, et al.
I-SPAN 2002