PublicationThin Solid FilmsPaperOn the deposition of amorphous silicon films from glow discharge plasmas of silaneThin Solid FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1977PublicationThin Solid FilmsAuthorsM.H. BrodskyIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare
