Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Transport and magnetic properties of pyrolyzed Kapton are studied for different pyrolysis temperatures. We show that well below the graphitization level, pyrolyzed Kapton exhibits isotropic conductivities comparable to those measured for doped polyacetylene. Variable range hopping is suggested as a possible mechanism for this high conductivity. The effect of pyrolysis on carrier number and mobility has been investigated. It has been shown that for low pryolysis temperatures (Tp < 650°C) it is the carrier number which predominantly increases while for Tp 〉 650°C the most significant changes occur in the carrier mobility. © 1980, All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT
Ellen J. Yoffa, David Adler
Physical Review B
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics