Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The frictional properties of different types of carbon surfaces, graphite, diamond, hydrogenated amorphous carbon (a-C), and C60 buckminsterfullerene, are studied in air at low loads (below 1.5 μN) by friction force microscopy. The different types of carbons have frictional coefficients varying from 0.01 to 0.8, demonstrating the ability of friction force microscopy to distinguish between the different types of carbon. For a-C carbon on a magnetic disk surface, the surface topography greatly influences the observed friction, complicating the interpretation of the friction force for this practical surface. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
K.A. Chao
Physical Review B
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011