Nanoscale replication for scanning probe data storage

Abstract

Recently, there have been significant advances in demonstrating the possible application of scanning probe techniques for high density data storage. While many obstacles have yet to be overcome, one of the more promising applications of such devices is for very high density read-only disk drives. Such an application requires the means to pattern and replicate nanometer scale features over macroscopic dimensions. We have developed a technique for both mastering and replicating data patterns for use in such a device at a density 100 times that of current read-only disks. The process consists of using electron beam lithography to write data features as small as 50 nm and a photopolymerization process to faithfully replicate the written marks. © 1996 American Institute of Physics.