Ronald Troutman
Synthetic Metals
Thin films of an ordered polystyrene-polymethyl(methacrylate) (PS-PMMA) diblock copolymer was formed over full 8-in.-diam silicon wafers and on various substrate materials. The important process parameters for forming the nanoscale templates were analyzed. It was found that under proper conditions, well-ordered hexagonal arrays of sub-20 nm domains can be formed on a tight pitch.
Ronald Troutman
Synthetic Metals
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films