Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Thin films of an ordered polystyrene-polymethyl(methacrylate) (PS-PMMA) diblock copolymer was formed over full 8-in.-diam silicon wafers and on various substrate materials. The important process parameters for forming the nanoscale templates were analyzed. It was found that under proper conditions, well-ordered hexagonal arrays of sub-20 nm domains can be formed on a tight pitch.
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
Imran Nasim, Melanie Weber
SCML 2024