J.H. Stathis, R. Bolam, et al.
INFOS 2005
A report on the progress in nanofabrication technology was presented. The principles and limits of the various pattern formation techniques which have emerged as important tools in the research nanoscale devices and structures were discussed. Topics such as electron beam lithography, imprint lithography, proximal probes and self assembly were also discussed.
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry