Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
A report on the progress in nanofabrication technology was presented. The principles and limits of the various pattern formation techniques which have emerged as important tools in the research nanoscale devices and structures were discussed. Topics such as electron beam lithography, imprint lithography, proximal probes and self assembly were also discussed.
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Imran Nasim, Melanie Weber
SCML 2024
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics