Conference paper
Soft x-ray diffraction of striated muscle
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
A report on the progress in nanofabrication technology was presented. The principles and limits of the various pattern formation techniques which have emerged as important tools in the research nanoscale devices and structures were discussed. Topics such as electron beam lithography, imprint lithography, proximal probes and self assembly were also discussed.
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
R. Ghez, M.B. Small
JES
T.N. Morgan
Semiconductor Science and Technology