Publication
IEDM 2014
Conference paper

Multiple breakdown phenomena and modeling for non-uniform dielectric systems

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Abstract

We report a wide range of experimental observations of multiple breakdown (BD) phenomena in BEOL/FEOL/MOL dielectric systems with large variability (non-uniformity). Newly developed successive breakdown theory of time-dependent clustering model can well capture these multiple BD events with and without correlation. The understanding of these effects can potentially lead to much improved and realistic projection for future technology nodes.

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Publication

IEDM 2014

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