Conference paper
A novel high-performance lateral bipolar on SOI
G. Shahidi, D.D. Tang, et al.
IEDM 1991
Multilevel monolithic inductors implemented in a standard BiCMOS technology are presented. Use of top metal layers shunted with vias provides Q values approaching 10 at 2.4GHz and above 6 at 900MHz for a 2nH inductor. There is no modification to the conventional wiring metallurgy and no need for extra processing steps. © 1995, IEE. All rights reserved.
G. Shahidi, D.D. Tang, et al.
IEDM 1991
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BCTM 1993
J.N. Burghartz, M. Soyuer, et al.
BCTM 1996
J.N. Burghartz, B.J. Ginsberg, et al.
ESSDERC 1988