Monolithic Integration of Si/BaTiO ₃ Electro-Optic Modulators on a Silicon Photonics Platform

Abstract

We demonstrate an electro-optic modulator exploiting the Pockels effect, which we monolithically integrated on an advanced silicon photonics platform. We show integration through wafer bonding and discuss further integration paths. The devices, based on BaTiO 3 films, show excellent VπL (0.3 Vcm) and V π Lα (1.7 VdB).