Conference paper
A new family of non-chemically amplified resists
Ari Aviram, Marie Angelopoulos, et al.
Microlithography 1998
No abstract available.
Ari Aviram, Marie Angelopoulos, et al.
Microlithography 1998
Ari Aviram, Kwang K. Shih, et al.
IS&T/SPIE Electronic Imaging 1991
Ari Aviram
Advanced Materials
Michael J. Rooks, Ari Aviram
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures