CICC 2004
Conference paper

MEMS and nanotechnology - Hot or hype?


The significance of micro-electromechanical systems (MEMS) and nanotechnology in semiconductor industry is discussed. The research activities conducted on these fields by government laboratories and technology companies allow the production of tiny mechanical devices such as sensors and other micro-scale devices. The commercial applications of MEMS include sensors for automotives and optical communication. R&D investments in nanotechnology and MEMS will allow development of more advanced devices in semiconductor industry.