J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
The principles of producing direct negatives and direct plates by electroerosion writing were given in Part I of this series of papers. Part II is concerned with larger-scale fabrication techniques, characterization methods, and the results of tests, together with their interpretation. Major problems which were encountered are also presented with their solutions.
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
S.M. Sadjadi, S. Chen, et al.
TAPIA 2009
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University