I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
A microactuator technology utilizing magnetic thin films and polysilicon flexures in applied to torsional microstructures. These structures are constructed in a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, and equipment. A microactuated mirror made from a 430 μm × 130 μm × 15 μm nickel-iron plate attached to a pair of 400 μm × 2.2 μm × 2.2 μm polysilicon torsional beams has been rotated more than 90° out of the plane of the wafer and actuated with a torque greater than 3.0 nN m. The torsional flexure structure constrains motion to rotation about a single axis, which can be an advantage for a number of microphonic applications (e.g., beam chopping, scanning, and steering).
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
R.W. Gammon, E. Courtens, et al.
Physical Review B
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures