Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The magnetic dichroism in the L2,3 emission spectra of Fe, Co, and Ni, following excitation with circularly polarized x rays, is found to exhibit a dramatic dependence on excitation energy. The observed changes in sign and intensity of the dichroism spectra are explained by a simple model and are shown to negate the use of x-ray fluorescence yield detection for quantitative dichroism absorption measurements. Multielectron effects are found to be minimized by use of monochromatic threshold excitation. © 1994 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Hiroshi Ito, Reinhold Schwalm
JES
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JES