Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Hopscotch methods for solving time dependent partial differential equations are derived using a locally-one-dimensional splitting instead of the standard alternating direction splitting. This is a natural extension of such methods and their possible flexibility in certain situations is discussed. © 1978.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
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