S. Sankaran, S. Arai, et al.
IEDM 2006
The identification of linear materials for direct electrodeposition of Cu was discussed. Adhesion, recrystallization, texture and resistivity of the plated film were studied. Results showed a family of metals which allow direct Cu electrodeposition in standard acid plating baths.
S. Sankaran, S. Arai, et al.
IEDM 2006
F.R. McFeely, J.F. Morar, et al.
Symposium on Plasma Processing 1986
D. Ugolini, S.P. Kowalczyk, et al.
Journal of Applied Physics
P.F. Seidler, S.P. Kowalczyk, et al.
MRS Proceedings 1992