Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
The formation of conducting films from composite films comprised of gold clusters in plasma polymerized polyfluorocarbon (PPFC) is described. A focused, visible laser beam is used to coalesce the gold clusters within the PPFC matrix. Heating the composite with the laser causes the film to collapse with a loss of weight due to decomposition and volatilization of the polymer. Under the appropriate laser power and scanning conditions, coalescence of the gold particles results in a conducting metal line, exhibiting close to bulk metal resistivity. © 1994.
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Mark W. Dowley
Solid State Communications
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SPIE Advanced Lithography 2007
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Technical Digest-International Electron Devices Meeting