T.T. Kodas, E.M. Engler, et al.
Applied Physics Letters
The laser chemical vapor deposition (LCVD) of aluminum and gold has been achieved via pyrolytic decomposition of trimethylamine aluminum hydride and dimethylgold (β-diketonates), respectively. The rates of metal deposition, the purity of the deposited metals, and the electrical properties of the deposits are a direct result of the chemical and physical properties of the precursor and the metal.
T.T. Kodas, E.M. Engler, et al.
Applied Physics Letters
R.D. Allen, Juliann Opitz, et al.
SPIE Advances in Resist Technology and Processing 1999
G.M. Wallraff, Carl E. Larson, et al.
Proceedings of SPIE-The International Society for Optical Engineering
C.R. Moylan, T.H. Baum, et al.
Applied Physics A Solids and Surfaces