Publication
High temperature science
Paper

Laser-induced chemical vapor deposition of high-purity metals

Abstract

The laser chemical vapor deposition (LCVD) of aluminum and gold has been achieved via pyrolytic decomposition of trimethylamine aluminum hydride and dimethylgold (β-diketonates), respectively. The rates of metal deposition, the purity of the deposited metals, and the electrical properties of the deposits are a direct result of the chemical and physical properties of the precursor and the metal.

Date

01 Dec 1988

Publication

High temperature science

Authors

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