Publication
Mikroelektronik
Paper

Laser-beam photoemission testing of ultrafast integrated circuits

Abstract

The development of VLSI circuits calls for special design techniques and failure analysis. A laser-beam based contactless photoemission test method was developed for high-sensitivity voltage measurements of very fast signals at interior lines and junctions of such circuits. Features of the method are pointed out.

Date

01 Mar 1989

Publication

Mikroelektronik

Authors

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