Publication
EOS/ESD 2014
Conference paper

Junction engineering for SOI SCR triggering and performance improvement

Abstract

Junction engineering solutions are presented in this work to improve the triggering and performance of SCR devices in an advanced 22nm SOI CMOS technology. Several SCR cathode junction formations are investigated including implants energy, dosage, with or without halo/extension implants. TLP and HBM results are presented in details.

Date

Publication

EOS/ESD 2014

Authors

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