F. Horst, R. Germann, et al.
IEEE Photonics Technology Letters
Paper
Ion Microbeam Radiation System
Abstract
An ion microbeam radiation test system has been built for studying radiation-induced charge collection and single event upsets in advanced semiconductor circuits. With this system, it is possible to direct an ion beam of diameter as small as 1 p.m onto a circuit or test structure with a placement accuracy of 1 μm. The components of the system, and its operation, are described. Applications are described which demonstrate the capabilities of the system. © 1993 IEEE
Related
K. Rim, J.O. Chu, et al.
VLSI Technology 2002
S.J. Koester, K.L. Saenger, et al.
IEEE Electron Device Letters
Conference paper
Low temperature SER and noise in a high speed DRAM
W.H. Henkels, N.C.-C. Lu, et al.
Workshop on Low Temperature Semiconductor Electronics 1989