Ion-assisted deposition of bulklike ZrO₂ films

Abstract

Stable thin films of zirconium dioxide are produced by ion-assisted electron beam deposition at room temperature and 300°C. The method yields films with substantially increased packing density resulting in refractive indices close to the bulk value. The improvement in optical properties is accompanied by an amorphous to cubic crystalline transition of the film structure which is mixed with a monoclinic phase for heated films.