Investigations on the structural morphology of sulfonium salt containing polymethacrylate films

Abstract

In this report, the authors have investigated the structural morphology of blends of the onium salt TPSHA with a series of model methacrylate polymers. The morphology of these blends, measurements of the level of mixing of the onium salt with the polymer matrix, and the correlation of these results with acid-generation measurements on spin-coated films are discussed.