Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We report on the interfacial intermixing of ultrathin Co films on a Cu(001) single crystal, two materials that are immiscible in the bulk. With increasing deposition rate we find a crossover from layer-by-layer to bilayer growth due to a hindered diffusion from the first layer to the substrate. Above two monolayers, growth proceeds in a layer-by-layer fashion. These effects are explained in terms of surface free energies. © 1997 Elsevier Science B.V.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, J.S. Lew
Journal of Crystal Growth
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films