Conference paper
Damage enhanced diffusion
Alwin E. Michel
Symposium on Process Physics and Modeling in Semiconductor Technology 1990
No abstract available.
Alwin E. Michel
Symposium on Process Physics and Modeling in Semiconductor Technology 1990
Alwin E. Michel, W. Rausch, et al.
Applied Physics Letters
E.J. Walker, Alwin E. Michel
Journal of Applied Physics
Alwin E. Michel, F. Fang, et al.
Journal of Applied Physics