About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
Journal of Applied Physics
Paper
Interactions in the Co/Si thin-film system. I. Kinetics
Abstract
Interactions in the Co/Si thin-film system were investigated by MeV backscattering and x-ray-diffraction techniques. It was found that Si diffuses through the Co layer and accumulates at the sample surface at about 300 °C. Increasing the temperature causes the growth of the Co2Si phase, followed by the simultaneous growth of the CoSi phase. The growth rates for both phases have a square root of time dependence. The activation energies of growth are 1.5 and 1.9 eV for the Co2Si and CoSi phase, respectively. A model for the growth of multiple phases is suggested. The transformation between CoSi2 and CoSi is found to be a reversible reaction.