Publication
OECC 2009
Conference paper

Integration of nanophotonic devices for on-chip optical interconnects

View publication

Abstract

Compact germanium waveguide photodetector with 40Gbps bandwidth and 0.4A/W responsivity is demonstrated. High-quality Ge-on-insulator single-crystalline layer was monolithically integrated into front-end CMOS process by lateral seeded crystallization. © 2009 IEEE.

Date

Publication

OECC 2009