Integrated waveguide-photodetector using Si/SiGe multiple quantum wells for long wavelength applications

Abstract

An Si/SiGe integrated rib waveguide-photodetector for long wavelength applications has been fabricated. Low-loss (1-2 dB/cm at 1.3 μm) silicon waveguides on SOI (silicon-on-insulator) have been fabricated. Remote coupling of optical fiber to photodetector through the silicon waveguide was successfully accomplished. The integrated waveguide-P-i-N detectors exhibited low reverse leakage currents (10-30 pA/μm2 at 15 V reverse bias) and 50% internal quantum efficiency at 1.1 μm, with a frequency response bandwidth of 1-2 GHz. These results show promise for an integrated preamplifier-detector for an all Si-based long wavelength receiver.