R. Ghez, J.S. Lew
Journal of Crystal Growth
The recovery of the RHEED specular intensity during interrupted MBE is investigated by application of a Monte Carlo simulation of the solid-on-solid model. Procedures are described for characterizing the pathways and quantifying energy barriers to surface recovery in both low- and high-temperature limits in ways that complement and extend existing techniques. © 1989.
R. Ghez, J.S. Lew
Journal of Crystal Growth
R. Ghez, M.B. Small
JES
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IEEE J-STARS
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering