Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Inelastic-electron-scattering measurements from Si(111)-7×7 and thin metal films on Si(111) are obtained for several different temperatures and analyzed with use of dipole scattering theory. A detailed discussion of the shape and temperature dependence of the quasielastic peak is presented. In particular, we show how the temperature-dependent width of the quasielastic peak can be used to obtain information regarding the surface free-carrier density, surface effective mass, and the surface conductivity. Analysis of the Si(111)-7×7 surface suggests an unusual surface electronic structure where a narrow state occurs within a surface-state band gap and determines the Fermi-level position. Analysis of Au and Pd metal films on Si(111) allows us to determine film resistivities as well as delineate microstructural features which influence surface transport properties. © 1984 The American Physical Society.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A. Reisman, M. Berkenblit, et al.
JES
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997