Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In this paper, we review our work on III-V/SOI photonic integrated circuits for short-wave infrared applications. We focus on the integration of short-wave infrared photodetectors on a silicon photonics platform and on the generation of a short-wave infrared supercontinuum using the χ (3) nonlinearity in silicon photonic wires. In addition, the performance of a silicon optical parametric amplifier is reviewed, as a first step towards constructing an integrated tunable short-wave infrared parametric oscillator. © 2006 IEEE.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
J.H. Stathis, R. Bolam, et al.
INFOS 2005