Far UV pulsed laser melting of silicon

Abstract

Calorimetric, acoustic, and morphological studies of silicon irradiated with intense 14-ns, 193-nm excimer laser pulses are reported. To within the experimental uncertainty, the entire radiation absorbed is converted to heat at all fluences. The volume changes on melting leads to enhanced acoustic wave generation. The morphology of the surface damage is consistent with the existence of both standing surface acoustic waves and of capillary waves.